i-line positive resist, tuned for the LITHOS exposure profile. Compatibility: LITHOS One, LITHOS Lab.
Prime grade p-type 100 wafers, polished one side. Pack of 25.
Affordable mechanical-grade 50 mm wafers for process calibration.
TMAH-based developer matched to our positive resist line.
Diffraction-limited projection module, field-replaceable.
Köhler-style uniform illumination module, < 2% non-uniformity.
Closed-loop linear stage, drop-in replacement for the LITHOS deck.
Porous-ceramic chuck for flat hold of 100 mm wafers.
Gloves, wipes, swabs and IPA - enough for ~50 wafer runs.