PARTS — Catalog
Everything that touches a wafer.
Order through us with a single quote — we pack matched lots so your recipes stay reproducible from one box to the next.
Silicon Wafer · 4" · P/100
Prime grade p-type 100 wafers, polished one side. Pack of 25.
Test Wafer · 2" · Mechanical
Affordable mechanical-grade 50 mm wafers for process calibration.
Positive Photoresist · 500 ml
i-line positive resist, tuned for the LITHOS exposure profile.
Developer · Metal-ion-free · 1 L
TMAH-based developer matched to our positive resist line.
Projection Optic · MK2
Diffraction-limited projection module, field-replaceable.
Condenser · Uniform Illuminator
Köhler-style uniform illumination module, < 2% non-uniformity.
XY Stage · 25 mm
Closed-loop linear stage, drop-in replacement for the LITHOS deck.
Vacuum Chuck · 4"
Porous-ceramic chuck for flat hold of 100 mm wafers.
Cleanroom Starter Kit
Gloves, wipes, swabs and IPA - enough for ~50 wafer runs.
HEPA Filter · Replacement
H13 HEPA cartridge for the internal mini-cleanroom.
UV LED Module · 365 nm
Replacement i-line source with active cooling.
Door Interlock · Service Kit
Magnetic interlock + sensor, full replacement assembly.